PRODUCTS

(주)펀솔루션테크놀러지

Item	Description	Remark
Chamber type	Square & Vertical
Materials	Stainless steel
Vacuum gauge	Full Range Gauge
Hi-vac. pump	Cryo Pump
Low-vac. pump	Dry Pump
Substrate moving	Rotation : 0~30rpm Up/down -Tray moving
Wall heating	By micro sheath heater Control temp : 80 ℃	Heater base

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